Amanote Research
Register
Sign In
Stability of Wafer Level Vacuum Encapsulated Single-Crystal Silicon Resonators
doi 10.1109/sensor.2005.1496567
Full Text
Open PDF
Abstract
Available in
full text
Date
Unknown
Authors
V. Kaajakari
J. Kiihamaki
A. Oja
H. Sepp
S. Pietikainen
V. Kokkala
H. Kuisma
Publisher
IEEE
