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Processing of PbTiO{sub 3} and Pb(Zr{sub X}Ti{sub 1{minus}x})O{sub 3} Thin Films by Novel Single-Solid-Source Metalorganic Chemical Vapor Deposition
doi 10.2172/486173
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Date
June 1, 1997
Authors
P. Lu
H. Li
S. Sun
B. Tuttle
Publisher
Office of Scientific and Technical Information (OSTI)