High-Q-Factor Al2O3 Micro-Trench Cavities Integrated With Silicon Nitride Waveguides on Silicon
Optics Express- United States
doi 10.1364/oe.26.011161
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Date
April 16, 2018
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Publisher
The Optical Society
doi 10.1364/oe.26.011161
Available in
April 16, 2018
The Optical Society