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Publications by A. N. Sheveyko
Investigation of the Si–B–C–N Thin Coatings Deposited Using Magnetron Sputtering of SiBC Targets
Izvestiya Vuzov. Tsvetnaya Metallurgiya (Proceedings of Higher Schools. Nonferrous Metallurgy)
Related publications
Tribological Behavior of Ti-Al-Si-C-N Hard Coatings Deposited by Hybrid Arc-Enhanced Magnetron Sputtering
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surfaces
Films
Interfaces
Condensed Matter Physics
Coatings
Growth and Properties of Amorphous Ti–B–Si–N Thin Films Deposited by Hybrid HIPIMS/DC-magnetron Co-Sputtering From TiB2 and Si Targets
Surface and Coatings Technology
Surfaces
Condensed Matter Physics
Interfaces
Materials Chemistry
Films
Coatings
Chemistry
Photocatalytic Properties of Doped TiO2 Coatings Deposited Using Reactive Magnetron Sputtering
Coatings
Surfaces
Films
Coatings
Materials Chemistry
Interfaces
AlNxOy Thin Films Deposited by DC Reactive Magnetron Sputtering
Applied Surface Science
Surfaces
Astronomy
Condensed Matter Physics
Interfaces
Films
Coatings
Chemistry
Physics
Synthesis and Characterization of La2NiO4+δ Coatings Deposited by Reactive Magnetron Sputtering Using Plasma Emission Monitoring
Solid State Ionics
Materials Science
Chemistry
Condensed Matter Physics
Analysis of GaAs-Ti Thin Films Deposited by Sputtering Onto C-Si and GaAs
Microstructure and Properties of CrAlSiN Coatings Deposited by HiPIMS and Direct-Current Magnetron Sputtering
Coatings
Surfaces
Films
Coatings
Materials Chemistry
Interfaces
Phase Tailoring of Tantalum Thin Films Deposited in Deep Oscillation Magnetron Sputtering Mode
Structural and Mechanical Properties of Amorphous AlMgB14 Thin Films Deposited by DC Magnetron Sputtering on Si, Al2O3 and MgO Substrates
Applied Physics A: Materials Science and Processing
Materials Science
Chemistry
