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Publications by A. Philipossian

Effect of Slurry Flow Rate on Tribological, Thermal, and Removal Rate Attributes of Copper CMP

Journal of the Electrochemical Society
SurfacesCondensed Matter PhysicsOpticalElectrochemistrySustainabilityMaterials ChemistryMagnetic MaterialsRenewable EnergyFilmsCoatingsElectronicthe Environment
2004English

Viewing Asperity Behavior Under the Wafer During CMP

Electrochemical and Solid-State Letters
2005English

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