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Publications by A. Szeghalmi
Application of Double Patterning Technology to Fabricate Optical Elements: Process Simulation, Fabrication, and Measurement
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Surfaces
Electronic Engineering
Condensed Matter Physics
Instrumentation
Electronic
Optical
Materials Chemistry
Electrical
Magnetic Materials
Films
Process Chemistry
Coatings
Technology
Related publications
Double Patterning Materials for Sub-40nm Application
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
Application of Micro-Fabrication Technology to Cell-Activity Measurements
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Mechanical Engineering
Fabrication of Poly(vinylidene Fluoride) Film and Application to Printing Technology
Mechanical Engineering Journal
Application of Optical Multichannel Dectors to Spectroscopic Measurement.
Journal of the Spectroscopical Society of Japan
Fabrication Process of Silica Film for Optical Waveguides
Optoelectronics
Simulation, Technology, and the Decision Process
ACM Transactions on Modeling and Computer Simulation
Modeling
Computer Science Applications
Simulation
On the Application of Fourier's Double Integrals to Optical Problems
Philosophical Transactions of the Royal Society of London. Series A, Containing Papers of a Mathematical or Physical Character
Application of Optical Measurement Technology in the Maintenance of Infrastructure^|^mdash;Full-Field Strain Measurement by DICM and Vibration Measurement by LDV^|^mdash;
Concrete Journal
Human Sensory Measurement Application Technology
The Japanese journal of ergonomics
