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Publications by Abbas Rastegar

Overcoming Mask Blank Defects in EUV Lithography

SPIE Newsroom
2009English

Related publications

EUV Mask Blank Fabrication & Metrology

AIP Conference Proceedings
AstronomyPhysics
2003English

22X Mask Cleaning Effects on EUV Lithography Process and Lifetime

2011English

EUV Lithography

Synchrotron Radiation News
High Energy PhysicsNuclearOpticsAtomicMolecular Physics,
2019English

Progress in EUV Resists Towards High-Na EUV Lithography

2019English

Secondary Electrons in EUV Lithography

Journal of Photopolymer Science and Technology
Organic ChemistryPolymersMaterials ChemistryPlastics
2013English

Pattern Replication in EUV Interference Lithography

Journal of Photopolymer Science and Technology
Organic ChemistryPolymersMaterials ChemistryPlastics
2008English

Approach to EUV Lithography Simulation

2011English

EUV Lithography and Exposure Tool.

Journal of Plasma and Fusion Research
2003English

EUV Light Sources for Next-Gen Lithography

Optics and Photonics News
Electronic EngineeringCondensed Matter PhysicsElectronicMolecular Physics,OpticalElectricalAtomicMagnetic MaterialsOptics
2018English

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