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Publications by Akhtar Mirfazli
Characterization of Piezoelectric AlN Thin Films Deposited on Si by RF Reactive Magnetron Sputtering at Low Temperature for Acoustic Wave Devices
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Vanadium Oxide Thin Films Obtained by Thermal Annealing of Layers Deposited by RF Magnetron Sputtering at Room Temperature
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Effect of Ion Irradiation on Vanadium Oxide Thin Films Deposited by Reactive RF Sputtering Technique
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