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Publications by Akira Koide
Orientation-Dependent Etch Rate of Single Crystal Silicon Related to Etching Temperature.
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Mechanical Engineering
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Etching Figures of Silicon Crystal
The Journal of the Japanese Association of Mineralogists, Petrologists and Economic Geologists
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High Temperature Nanoscratching of Single Crystal Silicon Under Reduced Oxygen Condition
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Effects of Temperature Conditions on Fracture Toughness of Single Crystal Silicon Wafer
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Etch Pit Growth Behavior During DC Etching.
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Fracture Toughness of Single Crystal Silicon.
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