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Publications by Amal Chabli
Scanning He+ Ion Beam Microscopy and Metrology
Using a Simplified in Line Holography Method as a Qualitative Tool to Detect Local Heterogeneities in HfO2 Layers
TSOM Method for Nanoelectronics Dimensional Metrology
Analysis of the Noble Metals on Silicon Wafers by Chemical Collection and ICPMS
Current Voltage Characteristics Through Grains and Grain Boundaries of High-K Dielectric Thin Films Measured by Tunneling Atomic Force Microscopy
The Impact of Organic Contamination on the Oxide-Silicon Interface
Characterization of Nanodevices by STEM Tomography
Extending the Detection Limit of Dopants for Focused Ion Beam Prepared Semiconductor Specimens Examined by Off-Axis Electron Holography
Journal of Applied Physics
Astronomy
Physics
Characterization of Integrated Nano Materials