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Publications by Atsuhito SAWABE
Growth of Diamond Thin Films by Electron Assisted and DC Plasma Chemical Vapor Deposition.
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Mechanical Engineering
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Preparation of Thin Dielectric Films by Plasma-Assisted Chemical Vapor Deposition of Hexamethyldisilazane.
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Radio‐frequency Plasma Chemical Vapor Deposition Growth of Diamond
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surfaces
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Condensed Matter Physics
Coatings
Diamond Film Grown by Microwave Plasma-Assisted Vapor Deposition.
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
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Mechanical Properties of B(C,N) Thin Film by Plasma-Assisted Chemical Vapor Deposition.
SHINKU
High Speed Deposition of Y2O3 Films by Laser-Assisted Chemical Vapor Deposition
Materials Transactions
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Stress Evolution in Nanocrystalline Diamond Films Produced by Chemical Vapor Deposition
Journal of Applied Physics
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Deposition and Properties of Zn3N2 Thin Films by Atmospheric Pressure Chemical Vapor Deposition
Transactions of the Materials Research Society of Japan
Silicon Carbon Nitride Thin Films Deposited by Pulsed Microwave Plasma Assisted Chemical Vapour Deposition
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Electrochromic and Colorimetric Properties of Nickel(II) Oxide Thin Films Prepared by Aerosol-Assisted Chemical Vapor Deposition
ACS Applied Materials & Interfaces
Medicine
Materials Science
Nanotechnology
Nanoscience