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Publications by C. Herdey
Use of Photosensitive Polyimide for Deep X‐ray Lithography
Applied Physics Letters
Astronomy
Physics
Related publications
Validation of X-Ray Lithography and Development Simulation System for Moving Mask Deep X-Ray Lithography
Journal of Microelectromechanical Systems
Electronic Engineering
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X-Ray Lenses Fabricated by Deep X-Ray Lithography
Micro Capillary Array Chip for DNA Analysis Fabricated by Deep X-Ray Lithography
IEEJ Transactions on Sensors and Micromachines
Electronic Engineering
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Fabrication of Multimode Polymeric Waveguides and Micromirrors Using Deep X-Ray Lithography
IEEE Photonics Technology Letters
Electronic Engineering
Optics
Molecular Physics,
Optical
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Atomic
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A Soluble Photosensitive Polyimide
Fabrication of Tapered Micropillars With High Aspect-Ratio Based on Deep X-Ray Lithography
Materials
Materials Science
Condensed Matter Physics
Oxygen Quenching Effect in Ultra-Deep X-Ray Lithography With SU-8 Resist
Journal of Micromechanics and Microengineering
Mechanics of Materials
Electronic Engineering
Mechanical Engineering
Nanoscience
Optical
Electrical
Magnetic Materials
Nanotechnology
Electronic
X-Ray Lithography Sources: A Review
Nano-Crystalline Diamond Films for X-Ray Lithography Mask
