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Publications by Cheng Tzu Kuo

Forming Silicon Carbon Nitride Crystals and Silicon Carbon Nitride Nanotubes by Microwave Plasma-Enhanced Chemical Vapor Deposition

Applied Physics Letters

English

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Silicon Carbon Nitride Thin Films Deposited by Pulsed Microwave Plasma Assisted Chemical Vapour Deposition

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Low-Temperature Chemical-Vapor-Deposition of Silicon Nitride

Le Journal de Physique IV

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Growth of Carbon Nanotubes by Microwave Plasma-Enhanced Chemical Vapor Deposition at Low Temperature

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Condensed Matter Physics

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Development of Low Temperature Silicon Nitride and Silicon Dioxide Films by Inductively-Coupled Plasma Chemical Vapor Deposition

Materials Research Society Symposium - Proceedings

Mechanics of Materials

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Mechanical Engineering

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Deposition of Titanium Nitride on Porous Glass by Plasma-Enhanced Chemical Vapor Deposition.

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Growth of Aligned Carbon Nanotubes on Carbon Microfibers by Dc Plasma-Enhanced Chemical Vapor Deposition

Applied Physics Letters

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Growth of Silicon Nitride Crystals From Vapor Phaset

NIPPON KAGAKU KAISHI

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Preparation of Titanium Nitride Films by Plasma-Enhanced Chemical Vapor Deposition (II)

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Structural and Electrical Properties of Silicon Nitride Films Prepared by Multipolar Plasma‐enhanced Deposition

Journal of Applied Physics

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