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Publications by D. Leonhardt
Control of Plasma Flux Composition Incident on TiN Films During Reactive Magnetron Sputtering and the Effect on Film Microstructure
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surfaces
Films
Interfaces
Condensed Matter Physics
Coatings
Related publications
Nanostructure Formation During Deposition of TiN∕SiNx Nanomultilayer Films by Reactive Dual Magnetron Sputtering
Journal of Applied Physics
Astronomy
Physics
Microstructure and Mechanical Properties of TiN/TiCN/TiC Multilayer Thin Films Deposited by Magnetron Sputtering
Effect of the Degree of High Power Impulse Magnetron Sputtering Utilisation on the Structure and Properties of TiN Films
Thin Solid Films
Surfaces
Alloys
Optical
Interfaces
Metals
Materials Chemistry
Magnetic Materials
Films
Coatings
Electronic
Synthesis of Iron Oxide Films by Reactive Magnetron Sputtering Assisted by Plasma Emission Monitoring
Materials Chemistry and Physics
Materials Science
Condensed Matter Physics
Grid-Assisted Magnetron Sputtering Deposition of Nitrogen Graded TiN Thin Films
SN Applied Sciences
Effect of Additives on the Microstructure of Electroplated Tin Films
Journal of the Electrochemical Society
Surfaces
Condensed Matter Physics
Optical
Electrochemistry
Sustainability
Materials Chemistry
Magnetic Materials
Renewable Energy
Films
Coatings
Electronic
the Environment
AlNxOy Thin Films Deposited by DC Reactive Magnetron Sputtering
Applied Surface Science
Surfaces
Astronomy
Condensed Matter Physics
Interfaces
Films
Coatings
Chemistry
Physics
Effect of Sputtering Power on the Properties of TaN Thin Films Prepared by the Magnetron Sputtering
DEStech Transactions on Materials Science and Engineering
Evolution of Sputtering Target Surface Composition in Reactive High Power Impulse Magnetron Sputtering
Journal of Applied Physics
Astronomy
Physics
