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Publications by Dalil Rahman

Progress in Spin-On Hard Mask Materials for Advanced Lithography

Journal of Photopolymer Science and Technology
Organic ChemistryPolymersMaterials ChemistryPlastics
2014English

Responding to the Challenge: Materials Design for Immersion Lithography

Journal of Photopolymer Science and Technology
Organic ChemistryPolymersMaterials ChemistryPlastics
2006English

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