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Publications by Dario L. Goldfarb

Near Edge X-Ray Absorption Fine Structure Measurements of Surface Segregation in 157 Nm Photoresist Blends

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

English

Probing Surface and Bulk Chemistry in Resist Films Using Near Edge X-Ray Absorption Fine Structure

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

English