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Publications by Do-Seon Lee
Study on the Mechanism and Modeling for Super-Filling of High-Aspect-Ratio Features With Copper by Catalyst Enhanced Chemical Vapor Deposition Coupled With Plasma Treatment
Journal of Korean Institute of Metals and Materials
Surfaces
Alloys
Metals
Simulation
Optical
Magnetic Materials
Films
Modeling
Coatings
Electronic
Related publications
A Statistical Analysis of Copper Bottom Coverage of High-Aspect-Ratio Features Using Ionized Physical Vapor Deposition
IEEE Transactions on Semiconductor Manufacturing
Electronic Engineering
Industrial
Condensed Matter Physics
Manufacturing Engineering
Optical
Electrical
Magnetic Materials
Electronic
Deposition of Titanium Nitride on Porous Glass by Plasma-Enhanced Chemical Vapor Deposition.
SHINKU
Oxygen Plasma Assisted Enhanced Photoresponse of ZnO Nanowires Fabricated by Catalyst-Free Chemical Vapor Deposition
RSC Advances
Chemistry
Chemical Engineering
Effects of TaN Substrate Pretreatment by Ar Plasma on Copper Chemical Vapor Deposition
Journal of the Electrochemical Society
Surfaces
Condensed Matter Physics
Optical
Electrochemistry
Sustainability
Materials Chemistry
Magnetic Materials
Renewable Energy
Films
Coatings
Electronic
the Environment
Simultaneous Synthesis of Nanodiamonds and Graphene via Plasma Enhanced Chemical Vapor Deposition (MW PE-CVD) on Copper
SpringerPlus
Multidisciplinary
Ultra Water-Repellent Films With Controlled Surfaces Fabricated by Microwave Plasma-Enhanced Chemical Vapor Deposition.
Journal of the Surface Finishing Society of Japan
High-Aspect-Ratio Copper via Filling Used for Three-Dimensional Chip Stacking
Journal of the Electrochemical Society
Surfaces
Condensed Matter Physics
Optical
Electrochemistry
Sustainability
Materials Chemistry
Magnetic Materials
Renewable Energy
Films
Coatings
Electronic
the Environment
Photoluminescence From Carbon Structures Grown by Inductively Coupled Plasma Chemical Vapor Deposition
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surfaces
Films
Interfaces
Condensed Matter Physics
Coatings
Synthesis of Graphene by Magnetron-Plasma-Enhanced Chemical Vapor Deposition on Different Substrate Materials
Journal of the Vacuum Society of Japan
Surfaces
Instrumentation
Interfaces
Spectroscopy
Materials Science
