Discover open access scientific publications

Search, annotate, share and cite publications

Publications by Dong Guan

Potassium Hydroxide Polishing of Nanoscale Deep Reactive-Ion Etched Ultrahigh Aspect Ratio Gratings

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

Electronic Engineering

Condensed Matter Physics

Instrumentation

Materials Chemistry

Magnetic Materials

Process Chemistry

English