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Publications by Duane Boning

All-Digital Circuits for Measurement of Spatial Variation in Digital Circuits

IEEE Journal of Solid-State Circuits
Electronic EngineeringElectrical
2010English

Study on Stiffness and Conditioning Effects of CMP Pad Based on Physical Die-Level CMP Model

Journal of the Electrochemical Society
SurfacesCondensed Matter PhysicsOpticalElectrochemistrySustainabilityMaterials ChemistryMagnetic MaterialsRenewable EnergyFilmsCoatingsElectronicthe Environment
2010English

Nanotopography Issues in Shallow Trench Isolation CMP

MRS Bulletin
Materials ScienceTheoretical ChemistryCondensed Matter PhysicsPhysical
2002English

Re-Examining the Physical Basis of Pattern Density and Step Height CMP Models

Materials Research Society Symposium - Proceedings
Mechanics of MaterialsMaterials ScienceCondensed Matter PhysicsMechanical Engineering
2003English

Measurement and Analysis of Contact Plug Resistance Variability

2009English

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