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Publications by Ei Yano

A Resolution Enhancement Material for 193-Nm Lithography Comprising 2-Hydroxybenzyl Alcohol and Poly(vinyl Alcohol) With Uniform Resist Pattern Shrinkage

Journal of Photopolymer Science and Technology
Organic ChemistryPolymersMaterials ChemistryPlastics
2011English

Integration of High Performance CMOS Logic LSI by Applying Cu Wiring to SiLKT.M./SiO2 Hybrid Structure

Materials Transactions
Mechanics of MaterialsMaterials ScienceCondensed Matter PhysicsMechanical Engineering
2002English

Related publications

Photodissociation Dynamics of Benzyl Alcohol at 193 Nm

Journal of Chemical Physics
MedicineTheoretical ChemistryAstronomyPhysicsPhysical
2012English

Electrodialytic Transport Properties of Cation Exchange Membranes Prepared From Poly(vinyl Alcohol) and Poly(vinyl Alcohol-Co-2-Acrylamido-2-Methylpropane Sulfonic Acid)

Desalination and Water Treatment
Ocean EngineeringTechnologyWater SciencePollution
2010English

Topological Saponification of Oriented Poly(vinyl Trifluoroacetate) to Poly(vinyl Alcohol) With Gaseous Ammonia.

Proceedings of the Japan Academy Series B: Physical and Biological Sciences
MultidisciplinaryBiological SciencesMedicineAgriculturalAstronomyPhysics
1996English

Poly(Vinyl Alcohol)-Infiltrated Carbon Nanotube Carpets

Materials Sciences and Applications
2012English

Phase-Shift Mask Issues for 193-Nm Lithography

1994English

Hierarchic Structure of Poly(vinyl Alcohol) Gels.

Kobunshi Ronbunshu
Materials SciencePolymersPlasticsChemical EngineeringEnvironmental Science
1998English

Integration of Directed Self-Assembly With 193 Nm Lithography

Journal of Photopolymer Science and Technology
Organic ChemistryPolymersMaterials ChemistryPlastics
2010English

Studies on the Poly(vinyl Alcohol)-Degrading Enzyme. Part III. Purification and Properties of Oxidized Poly(vinyl Alcohol)-Degrading Enzyme.

Agricultural and Biological Chemistry
1981English

Crosslinked Chitosan/Poly (Vinyl Alcohol) Blends With Proton Conductivity Characteristic

Journal of the Brazilian Chemical Society
Chemistry
2010English

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