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Publications by Elijah Thimsen

Beyond Equilibrium Thermodynamics in the Low Temperature Plasma Processor

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
SurfacesElectronic EngineeringCondensed Matter PhysicsInstrumentationElectronicOpticalMaterials ChemistryElectricalMagnetic MaterialsFilmsProcess ChemistryCoatingsTechnology
2018English

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