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Publications by F. Ilievski

Pattern Generation by Using Multistep Room-Temperature Nanoimprint Lithography

IEEE Transactions on Nanotechnology
Electronic EngineeringNanotechnologyComputer Science ApplicationsElectricalNanoscience
2007English

Si-Containing Block Copolymers for Self-Assembled Nanolithography

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2008English

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