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Publications by F. Priolo

He Implantation to Control B Diffusion in Crystalline and Preamorphized Si

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

English

Related publications

Modeling of Ion Implantation and Diffusion in Si

Materials Science Forum

English

Comparison of Cu Gettering to H+ and He+ Implantation-Induced Cavities in Separation-By-Implantation-Of-Oxygen Wafers

Journal of Applied Physics

English

Cavity Formation and Impurity Gettering in He-Implanted Si

English

Si, Be, and C Ion Implantation in GaAs0.93P0.07

Journal of Applied Physics

English

Response of Cathodoluminescence of Alkali Feldspar to He+ Ion Implantation and Electron Irradiation

Geochronometria

Planetary Sciences

English

In-Situ TEM He+ Implantation and Thermal Aging of Nanocrystalline Fe

Microscopy and Microanalysis

Instrumentation

English

Bubble Formation in Er and ErD2 During in Situ He+ Ion Implantation

Microscopy and Microanalysis

Instrumentation

English

Planar InAs Photodiodes Fabricated Using He Ion Implantation

Molecular Physics,

English

Comment on Diffusion Effects in Ion Molecule Reactions He+ + O2 and He+ + N2 at High Fields

Journal of Chemical Physics

Theoretical Chemistry

English