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Publications by Franco Cerrina
Guest Editorial: Extreme Ultraviolet Interference Lithography
Journal of Micro/ Nanolithography, MEMS, and MOEMS
Electronic Engineering
Condensed Matter Physics
Mechanical Engineering
Electronic
Molecular Physics,
Nanoscience
Optical
Electrical
Atomic
Magnetic Materials
Nanotechnology
Optics
Related publications
Pushing Extreme Ultraviolet Lithography Development Beyond 22 Nm Half Pitch
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Intense Plasma Discharge Source at 135 Nm for Extreme-Ultraviolet Lithography
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Power Scaling of an Extreme Ultraviolet Light Source for Future Lithography
Applied Physics Letters
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Experimental Investigation of Beryllium-Based Multilayer Coatings for Extreme Ultraviolet Lithography
Enhancing Extreme Ultraviolet Photons Emission in Laser Produced Plasmas for Advanced Lithography
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Computational Study of Pattern Formation for Chemically Amplified Resists in Extreme Ultraviolet Lithography
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Interferometric Lithography With an Amplitude Division Interferometer and a Desktop Extreme Ultraviolet Laser
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Development of Compact Extreme Ultraviolet Interferometry for On-Line Test of Lithography Cameras
Ptychography as a Wavefront Sensor for High-Numerical Aperture Extreme Ultraviolet Lithography: Analysis and Limitations
Optical Engineering
Engineering
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Atomic
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