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Publications by Göran Stemme

3D Free-Form Patterning of Silicon by Ion Implantation, Silicon Deposition, and Selective Silicon Etching

Advanced Functional Materials
Materials ScienceCondensed Matter PhysicsElectrochemistryNanoscienceOpticalBiomaterialsMagnetic MaterialsNanotechnologyChemistryElectronic
2012English

Integrating MEMS and ICs

Microsystems and Nanoengineering
Electronic EngineeringIndustrialCondensed Matter PhysicsMaterials ScienceMolecular Physics,Manufacturing EngineeringElectricalAtomicOptics
2015English

Low-Power Microelectromechanically Tunable Silicon Photonic Ring Resonator Add–drop Filter

Optics Letters
OpticsAtomicMolecular Physics,
2015English

Design and Wafer-Level Fabrication of SMA Wire Microactuators on Silicon

Journal of Microelectromechanical Systems
Electronic EngineeringElectricalMechanical Engineering
2010English

Capacitive Inertial Sensing at High Temperatures of Up to 400 °C

Sensors and Actuators, A: Physical
SurfacesElectronic EngineeringAlloysCondensed Matter PhysicsInstrumentationMetalsOpticalElectricalMagnetic MaterialsFilmsCoatingsElectronic
2016English

Real-Time Intradermal Continuous Glucose Monitoring Using a Minimally Invasive Microneedle-Based System

Biomedical Microdevices
NanotechnologyBiomedical EngineeringMolecular BiologyNanoscience
2018English

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