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Publications by Gengchang Zhu
A Novel Thermally Evaporated Etching Mask for Low-Damage Dry Etching
IEEE Transactions on Nanotechnology
Electronic Engineering
Nanotechnology
Computer Science Applications
Electrical
Nanoscience
Related publications
Low-Damage Etching for AlGaN/GaN HEMTs Using Photo-Electrochemical Reactions
IEEE Transactions on Semiconductor Manufacturing
Electronic Engineering
Industrial
Condensed Matter Physics
Manufacturing Engineering
Optical
Electrical
Magnetic Materials
Electronic
A Novel Chemical Etching Reagent for Copper.
Journal of the Metal Finishing Society of Japan
Recent Progress in Dry Etching Technology.
Journal of the Surface Finishing Society of Japan
Investigation of “Fur-Like” Residues Post Dry Etching of Polyimide Using Aluminum Hard Etch Mask
Materials Science in Semiconductor Processing
Mechanics of Materials
Materials Science
Condensed Matter Physics
Mechanical Engineering
Etching Technologies of Silicon Wafer Using Dry Process
Journal of The Surface Finishing Society of Japan
A Dry Etching Simulation With a New Surface Reaction Model.
SHINKU
Fabrication and Characterization of Low Loss Rib Chalcogenide Waveguides Made by Dry Etching
Optics Express
Optics
Atomic
Molecular Physics,
Feedback Control of Plasma Etching Reactors for Improved Etching Uniformity
Chemical Engineering Science
Applied Mathematics
Chemistry
Chemical Engineering
Manufacturing Engineering
Industrial
Low Temperature SF6/O2ECR Plasma Etching for Polysilicon Gates
