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Publications by Georg Pawlowski

Bottom Anti-Reflective Coatings for DUV Lithography.

Journal of Photopolymer Science and Technology

Organic Chemistry

Materials Chemistry

English

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Bottom Antireflective Coatings (BARCs) for 157-Nm Lithography

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Implant Resist Approaches for 193nm Second Generation Radiation Sensitive Developable Bottom Anti Reflective Coatings

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The Need of Top Anti-Reflective Coating Materials for ArF Immersion Lithography

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Advances and Challenges in Developable Bottom Anti-Reflective Coating (DBARC)

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Simulation and Fabrication of Silicon Nitride Microring Resonator by DUV Lithography

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High-Reflective Coatings for Ground and Space Based Applications

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Diffraction-Limited Performance of Flat-Substrate Reflective Imaging Gratings Patterned by DUV Photolithography

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Experimental Investigation of Beryllium-Based Multilayer Coatings for Extreme Ultraviolet Lithography

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Highly Reflective Nanostructured Titania Shell: A Sustainable Pigment for Cool Coatings

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