Amanote Research
Register
Sign In
Discover open access scientific publications
Search, annotate, share and cite publications
Publications by Georg Pfusterschmied
High Performance Piezoelectric AlN MEMS Resonators for Precise Sensing in Liquids
Elektrotechnik und Informationstechnik
Electronic Engineering
Electrical
Related publications
1.05 GHz MEMS Oscillator Based on Lateral-Field-Excited Piezoelectric AlN Resonators
Dual-Beam Actuation of Piezoelectric AlN RF MEMS Switches Monolithically Integrated With AlN Contour-Mode Resonators
Journal of Micromechanics and Microengineering
Mechanics of Materials
Electronic Engineering
Mechanical Engineering
Nanoscience
Optical
Electrical
Magnetic Materials
Nanotechnology
Electronic
Power Handling and Related Frequency Scaling Advantages in Piezoelectric AlN Contour-Mode MEMS Resonators
Optimization of AlN Thin Layers on Diamond Substrates for High Frequency SAW Resonators
Materials Letters
Mechanics of Materials
Materials Science
Condensed Matter Physics
Mechanical Engineering
Thickness Mode High Frequency MEMS Piezoelectric Micro Ultrasound Transducers
Journal of Electroceramics
Mechanics of Materials
Electronic Engineering
Condensed Matter Physics
Materials Chemistry
Optical
Electrical
Magnetic Materials
Composites
Electronic
Ceramics
High-Q MgF_2 Whispering Gallery Mode Resonators for Refractometric Sensing in Aqueous Environment
Optics Express
Optics
Atomic
Molecular Physics,
Deep SiO2etching With Al and AlN Masks for MEMS Devices
Journal of Micromechanics and Microengineering
Mechanics of Materials
Electronic Engineering
Mechanical Engineering
Nanoscience
Optical
Electrical
Magnetic Materials
Nanotechnology
Electronic
Piezoelectric MEMS Power Generators for Vibration Energy Harvesting
Calibration of Piezoelectric Driven Mirrors for Laser Resonators
