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Publications by Hajime SHIRAI
Plasma Technology for Poly-Crystaline Silicon Thin Film Transister Manufacturing. Control of the Si-Network Structure by the High-Density Microwave Plasma Utilizing a Spoke Antenna.
SHINKU
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Fabrication and Properties of Diamond Thin-Film From N-Hexane by Using Microwave Plasma Process
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Poly-Si Thin-Film Transistors Crystallized by Electron-Beam Annealing
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Surfaces
Condensed Matter Physics
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Hydrophilic Silicon Oxide Film by Pulsed Plasma CVD
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Application of High Density Ar Plasma for Optical Thin Films Coating
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Remotely Induced High-Density Hollow-Anode Plasma and Its Application to Fast Deposition of Photosensitive Microcrystalline Silicon Thin Film With Preferential Orientation
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