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Publications by Haruhiko Ito
Fabrication of A-CNx Films by RF-plasma Decomposition of BrCN
Transactions of the Materials Research Society of Japan
Analysis of Dissociative Excitation Reaction of Tetramethylsilane With Microwave Discharge Flow of Ar
Transactions of the Materials Research Society of Japan
Dissociative Excitation Process of BrCN in the ECR Plasmas of Rare Gases
Transactions of the Materials Research Society of Japan
