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Publications by Heli Seppänen

Aluminum Nitride Transition Layer for Power Electronics Applications Grown by Plasma-Enhanced Atomic Layer Deposition

Materials Science

Condensed Matter Physics

English

Passivation of Detector‐Grade FZ‐Si With ALD‐Grown Aluminium Oxide

Physica Status Solidi (A) Applications and Materials Science

Electronic Engineering

Condensed Matter Physics

Materials Chemistry

Magnetic Materials

English

Related publications

Template-Based Synthesis of Aluminum Nitride Hollow Nanofibers via Plasma-Enhanced Atomic Layer Deposition

Journal of the American Ceramic Society

Materials Chemistry

English

Comparison of Mechanical Properties and Composition of Magnetron Sputter and Plasma Enhanced Atomic Layer Deposition Aluminum Nitride Films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Condensed Matter Physics

English

In Situ Infrared Absorption Study of Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride

English

Bipolar Resistive Switching Characteristics of Low Temperature Grown ZnO Thin Films by Plasma-Enhanced Atomic Layer Deposition

Applied Physics Letters

English

Tuning of Material Properties of ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition at Room Temperature

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Condensed Matter Physics

English

Thermal Atomic Layer Deposition of Polycrystalline Gallium Nitride

English

Thermal Atomic Layer Deposition of Polycrystalline Gallium Nitride

Journal of Physical Chemistry C

Theoretical Chemistry

Magnetic Materials

English

Atomic Layer Deposition for Energy and Environmental Applications

Advanced Materials Interfaces

Mechanics of Materials

Mechanical Engineering

English

Enhanced Piezoelectric Performance of the ZnO/AlN Stacked Nanofilm Nanogenerator Grown by Atomic Layer Deposition

Materials Science

English