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Publications by Heli Seppänen
Aluminum Nitride Transition Layer for Power Electronics Applications Grown by Plasma-Enhanced Atomic Layer Deposition
Materials
Materials Science
Condensed Matter Physics
Passivation of Detector‐Grade FZ‐Si With ALD‐Grown Aluminium Oxide
Physica Status Solidi (A) Applications and Materials Science
Surfaces
Electronic Engineering
Condensed Matter Physics
Materials Chemistry
Optical
Electrical
Magnetic Materials
Films
Coatings
Electronic
Interfaces
