Discover open access scientific publications

Search, annotate, share and cite publications

Publications by Hidehiko NONAKA

Measurement for Silane Density in Silane-Hydrogen Gas Mixtures Using a Quartz Sensor

Journal of the Vacuum Society of Japan

Instrumentation

Materials Science

English

Generation of High-Purity Ozone Beam and Its Application to the Formation of Ultra-Thin Silicon Dioxide Film.

English