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Publications by Hidetatsu Miyoshi
Fabricating a High-Resolution Mask With Improved Line-Edge Roughness by Using a Nonchemically Amplified Resist and a Postexposure Bake
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Surfaces
Electronic Engineering
Condensed Matter Physics
Instrumentation
Electronic
Optical
Materials Chemistry
Electrical
Magnetic Materials
Films
Process Chemistry
Coatings
Technology
Related publications
Organotin in Nonchemically Amplified Polymeric Hybrid Resist Imparts Better Resolution With Sensitivity for Next-Generation Lithography
Chemically Amplified Main Chain Scission: New Concept to Reduce Line Edge Roughness and Outgassing.
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
Fabricating Needle Arrays With a Gray-Scale X-Ray Mask
SPIE Newsroom
Determination of Optimum Thermalization Distance Based on Trade-Off Relationship Between Resolution, Line Edge Roughness and Sensitivity of Chemically Amplified Extreme Ultraviolet Resists
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
High Sensitivity Nonchemically Amplified Molecular Resists Based on Photosensitive Dissolution Inhibitors
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Surfaces
Electronic Engineering
Condensed Matter Physics
Instrumentation
Electronic
Optical
Materials Chemistry
Electrical
Magnetic Materials
Films
Process Chemistry
Coatings
Technology
Method for Fabricating a Low Stress X-Ray Mask Using Annealable Amorphous Refractory Compounds
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Development of a High Resolution Sensor for Surface Roughness
Optical Engineering
Engineering
Optics
Atomic
Molecular Physics,
Phase Noise Measurement Using a High Resolution Counter With On-Line Data Processing
Special Section Guest Editorial: Line-Edge Roughness
Journal of Micro/ Nanolithography, MEMS, and MOEMS
Electronic Engineering
Condensed Matter Physics
Mechanical Engineering
Electronic
Molecular Physics,
Nanoscience
Optical
Electrical
Atomic
Magnetic Materials
Nanotechnology
Optics
