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Publications by Hirofumi Kitayama

Slip-Free Rapid Thermal Processing in Single Wafer Furnace

Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

English

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Thermal Uniformity of 12-In Silicon Wafer During Rapid Thermal Processing by Inverse Heat Transfer Method

IEEE Transactions on Semiconductor Manufacturing

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Condensed Matter Physics

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Magnetic Materials

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Application of Flash-Assist Rapid Thermal Processing Subsequent to Low-Temperature Furnace Anneals

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

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Rapid Thermal Processing to Enhance Steel Toughness

Scientific Reports

Multidisciplinary

English

Millisecond Rapid Thermal Annealing of Si Wafer Induced by High Density Thermal Plasma Jet Irradiation

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Arbitrary Thermal History Control of Wafer in Photo Resist Processing Using Integrated Heating and Cooling Plate

Nippon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C

Mechanics of Materials

Mechanical Engineering

Manufacturing Engineering

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Reduction of Thermal Conductivity in Wafer-Bonded Silicon

Applied Physics Letters

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Furnace and Rapid Thermal Crystallization of Amorphous GexSi1−x and Si for Thin Film Transistors

Thin Solid Films

Materials Chemistry

Magnetic Materials

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Dynamic Dislocation Mechanisms for the Anomalous Slip in a Single-Crystal BCC Metal Oriented for "Single Slip"

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Processing and On-Wafer Test of Ferroelectric Film Microwave Varactors

Applied Physics Letters

English