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Publications by Hiroki Yonemitsu

Contact Hole Shrink Process Using Graphoepitaxial Directed Self-Assembly Lithography

Journal of Micro/ Nanolithography, MEMS, and MOEMS
Electronic EngineeringCondensed Matter PhysicsMechanical EngineeringElectronicMolecular Physics,NanoscienceOpticalElectricalAtomicMagnetic MaterialsNanotechnologyOptics
2013English

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