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Publications by Hiromu IWATA
Amorphous SiCS:H Films Prepared by Magnetron Sputtering of Si in CH4 and H2S
SHINKU
Properties of Amorphous SiC:O:H Films Prepared by Magnetron Sputtering of Si in CH4 and CO2.
SHINKU
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Optical and Electrical Properties of Amorphous SiC:H Prepared by Magnetron Sputtering.
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The Effects of Precursor C2H2 Fraction on Microstructure and Properties of Amorphous Carbon Composite Films Containing Si and Ag Prepared by Magnetron Sputtering Deposition
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Structure of Indium Nitride Thin Films Prepared by RF-magnetron Sputtering
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