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Publications by Hiroo Kinoshita

Comparison of Resist Family Outgassing Characterization Between EUV and EB

Journal of Photopolymer Science and Technology
Organic ChemistryPolymersMaterials ChemistryPlastics
2013English

A Study of Acid Diffusion Behaviors of PAG by Using Top Coat Method for EUVL

Journal of Photopolymer Science and Technology
Organic ChemistryPolymersMaterials ChemistryPlastics
2014English

Recent Progress in EUV Resist Outgas Research at EIDEC

Journal of Photopolymer Science and Technology
Organic ChemistryPolymersMaterials ChemistryPlastics
2015English

Extreme Ultraviolet (EUV)-Resist Material Based on Noria (Water Wheel-Like Macrocycle ) Derivatives With Pendant Alkoxyl and Adamantyl Ester Groups

Journal of Photopolymer Science and Technology
Organic ChemistryPolymersMaterials ChemistryPlastics
2012English

Pattern Replication in EUV Interference Lithography

Journal of Photopolymer Science and Technology
Organic ChemistryPolymersMaterials ChemistryPlastics
2008English

Outgassing Characteristics of Structural Materials and the Removal of Contaminants From EUVL Masks Using 172-Nm Radiation

Journal of Photopolymer Science and Technology
Organic ChemistryPolymersMaterials ChemistryPlastics
2004English

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