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Publications by I. Pollentier
Implementation of ArF Resist Processes for 130nm and Below.
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
Related publications
Highly-Efficient Photoacid Generators for ArF Resist.
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
Chemically Amplified Silicon Containing Resist for ArF Excimer Laser Lithography.
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
Chemically Amplified Si-Contained Resist Using Silsesquoxane for ArF Lithography (CASUAL) and Its Application to Bi-Layer Resist Process.
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
Deformation Analysis of ArF Resist Pattern by Using AFM
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
Immersion Lithography: Topcoat and Resist Processes
SPIE Newsroom
Design of Novel ArF Negative Resist System for Phase-Shifting Lithography Using Androsterone Structure With .DELTA.-Hydroxy Acid.
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
Modeling Ocean Processes Below Fimbulisen, Antarctica
Journal of Geophysical Research
Geochemistry
Space
Planetary Sciences
Oceanography
Paleontology
Petrology
Soil Science
Forestry
Atmospheric Science
Ecology
Geophysics
Aquatic Science
Earth
Earth-Surface Processes
Planetary Science
Technology
Water Science
Basic Aspects of Acid Generation Processes in Chemically Amplified Electron Beam Resist
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
Czech Republic and Processes of Industry 4.0 Implementation
Annals of DAAAM and Proceedings of the International DAAAM Symposium
Control
Systems Engineering
Industrial
Mechanical Engineering
Electronic Engineering
Manufacturing Engineering
Computer Science Applications
Electrical