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Publications by I. W. Rangelow

Mechanical, Geometrical, and Electrical Characterization of Silicon Membranes for Open Stencil Masks

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

English

Thickness Analysis of Silicon Membranes for Stencil Masks

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

English

Ion Implantation With Scanning Probe Alignment

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

English