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Publications by J.E. Bjorkholm

Development of Compact Extreme Ultraviolet Interferometry for On-Line Test of Lithography Cameras

English

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Extreme Ultraviolet Interferometry

English

Guest Editorial: Extreme Ultraviolet Interference Lithography

Journal of Micro/ Nanolithography, MEMS, and MOEMS

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Condensed Matter Physics

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Molecular Physics,

Magnetic Materials

English

Pushing Extreme Ultraviolet Lithography Development Beyond 22 Nm Half Pitch

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

English

Power Scaling of an Extreme Ultraviolet Light Source for Future Lithography

Applied Physics Letters

English

Experimental Investigation of Beryllium-Based Multilayer Coatings for Extreme Ultraviolet Lithography

English

Intense Plasma Discharge Source at 135 Nm for Extreme-Ultraviolet Lithography

Molecular Physics,

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Computational Study of Pattern Formation for Chemically Amplified Resists in Extreme Ultraviolet Lithography

Journal of Photopolymer Science and Technology

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Materials Chemistry

English

Enhancing Extreme Ultraviolet Photons Emission in Laser Produced Plasmas for Advanced Lithography

Physics of Plasmas

Condensed Matter Physics

English

Spectroscopic Study of Debris Mitigation With Minimum-Mass Sn Laser Plasma for Extreme Ultraviolet Lithography

Applied Physics Letters

English