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Publications by Jaakko Julin

Comparison of Mechanical Properties and Composition of Magnetron Sputter and Plasma Enhanced Atomic Layer Deposition Aluminum Nitride Films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Condensed Matter Physics

English

Related publications

Template-Based Synthesis of Aluminum Nitride Hollow Nanofibers via Plasma-Enhanced Atomic Layer Deposition

Journal of the American Ceramic Society

Materials Chemistry

English

Aluminum Nitride Transition Layer for Power Electronics Applications Grown by Plasma-Enhanced Atomic Layer Deposition

Materials Science

Condensed Matter Physics

English

Comparison of Thermal and Plasma-Enhanced Atomic Layer Deposition of Niobium Oxide Thin Films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Condensed Matter Physics

English

In Situ Infrared Absorption Study of Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride

English

Structural and Electrical Properties of Silicon Nitride Films Prepared by Multipolar Plasma‐enhanced Deposition

Journal of Applied Physics

English

Tuning of Material Properties of ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition at Room Temperature

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Condensed Matter Physics

English

Influence of Composition on Structure, Morphology and Dielectric Properties of BixAlyOz Composite Films Synthesized by Atomic Layer Deposition

English

Electrical and Mechanical Properties of Si-B-N Films Made by Plasma-Enhanced Chemical Vapor Deposition.

Transactions of the Japan Society of Mechanical Engineers Series A

English

Thermal Atomic Layer Deposition of Polycrystalline Gallium Nitride

Journal of Physical Chemistry C

Theoretical Chemistry

Magnetic Materials

English