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Publications by Jan Mulkens
Advancing Immersion Lithography
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
Related publications
Optical Materials for Immersion Lithography
Journal of Photopolymer Science and Technology
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Immersion Lithography: Topcoat and Resist Processes
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Successors of ArF Water-Immersion Lithography: EUV Lithography, Multi-E-Beam Maskless Lithography, or Nanoimprint?
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Quantitative Pattern Collapse Metrology for 193nm Immersion Lithography
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Responding to the Challenge: Materials Design for Immersion Lithography
Journal of Photopolymer Science and Technology
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New Prospect of Successors to ArF Water-Immersion Lithography
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Optical
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Receding Contact Lines: From Sliding Drops to Immersion Lithography
European Physical Journal: Special Topics
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Theoretical Chemistry
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High Refractive Index Fluid for Next Generation ArF Immersion Lithography
Journal of Photopolymer Science and Technology
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Position Analysis of a Hybrid Serial-Parallel Manipulator in Immersion Lithography
Mathematical Problems in Engineering
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