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Publications by Jarkko Etula
Aluminum Nitride Transition Layer for Power Electronics Applications Grown by Plasma-Enhanced Atomic Layer Deposition
Materials
Materials Science
Condensed Matter Physics
Comparison of Mechanical Properties and Composition of Magnetron Sputter and Plasma Enhanced Atomic Layer Deposition Aluminum Nitride Films
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surfaces
Films
Interfaces
Condensed Matter Physics
Coatings
Related publications
Template-Based Synthesis of Aluminum Nitride Hollow Nanofibers via Plasma-Enhanced Atomic Layer Deposition
Journal of the American Ceramic Society
Composites
Materials Chemistry
Ceramics
In Situ Infrared Absorption Study of Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride
Bipolar Resistive Switching Characteristics of Low Temperature Grown ZnO Thin Films by Plasma-Enhanced Atomic Layer Deposition
Applied Physics Letters
Astronomy
Physics
Tuning of Material Properties of ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition at Room Temperature
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surfaces
Films
Interfaces
Condensed Matter Physics
Coatings
Thermal Atomic Layer Deposition of Polycrystalline Gallium Nitride
Thermal Atomic Layer Deposition of Polycrystalline Gallium Nitride
Journal of Physical Chemistry C
Surfaces
Energy
Nanoscience
Theoretical Chemistry
Optical
Magnetic Materials
Films
Nanotechnology
Electronic
Coatings
Physical
Atomic Layer Deposition for Energy and Environmental Applications
Advanced Materials Interfaces
Mechanics of Materials
Mechanical Engineering
Enhanced Piezoelectric Performance of the ZnO/AlN Stacked Nanofilm Nanogenerator Grown by Atomic Layer Deposition
APL Materials
Materials Science
Engineering
