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Publications by Jee Soo Chang
A Silicon Nitride Microdisk Resonator With a 40-Nm-Thin Horizontal Air Slot
Optics Express
Optics
Atomic
Molecular Physics,
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Compositional Analysis of Silicon Oxide/Silicon Nitride Thin Films
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Optical Absorption of Silicon Nitride Membranes at 1064 Nm and at 1550 Nm
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Characteristics of Polycrystalline Silicon Thin-Film Transistors With Thin Oxide/Nitride Gate Structures
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Simulation and Fabrication of Silicon Nitride Microring Resonator by DUV Lithography
Demonstration of Critical Coupling in an Active III-nitride Microdisk Photonic Circuit on Silicon
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Squeezed Light From a Silicon Micromechanical Resonator
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Vibrational Spectroscopy of Chemical Species in Silicon and Silicon-Rich Nitride Thin Films
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