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Publications by K. D. Mackenzie

Development of Low Temperature Silicon Nitride and Silicon Dioxide Films by Inductively-Coupled Plasma Chemical Vapor Deposition

Materials Research Society Symposium - Proceedings

Mechanics of Materials

Materials Science

Condensed Matter Physics

Mechanical Engineering

English

Related publications

Low-Temperature Chemical-Vapor-Deposition of Silicon Nitride

Le Journal de Physique IV

English

Low-Temperature Deposition of Silicon Dioxide Films in High-Density Plasma

Semiconductor Physics, Quantum Electronics and Optoelectronics

Electronic Engineering

Molecular Physics,

Magnetic Materials

English

Forming Silicon Carbon Nitride Crystals and Silicon Carbon Nitride Nanotubes by Microwave Plasma-Enhanced Chemical Vapor Deposition

Applied Physics Letters

English

Low-Temperature, Low-Pressure Chemical Vapor Deposition and Solid Phase Crystallization of Silicon–Germanium Films

Journal of the Electrochemical Society

Condensed Matter Physics

Electrochemistry

Materials Chemistry

Magnetic Materials

Renewable Energy

the Environment

English

High‐rate, Low‐temperature Deposition of Multifunctional Nano‐crystalline Silicon Nitride Films

Journal of Information Display

Electronic Engineering

Materials Science

English

Silicon Carbon Nitride Thin Films Deposited by Pulsed Microwave Plasma Assisted Chemical Vapour Deposition

Journal of Applied Sciences

English

Photoluminescence From Carbon Structures Grown by Inductively Coupled Plasma Chemical Vapor Deposition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Condensed Matter Physics

English

Preparation of Titanium Nitride Films by Plasma-Enhanced Chemical Vapor Deposition (II)

English

Gallium Assisted Plasma Enhanced Chemical Vapor Deposition of Silicon Nanowires

Mechanics of Materials

Electronic Engineering

Mechanical Engineering

Materials Science

English