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Publications by K. L. Seaward
Donor Neutralization in GaAs After Plasma Silicon Nitride Deposition
Applied Physics Letters
Astronomy
Physics
Semiconductor Damage From Inert and Molecular Gas Plasmas
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Related publications
Forming Silicon Carbon Nitride Crystals and Silicon Carbon Nitride Nanotubes by Microwave Plasma-Enhanced Chemical Vapor Deposition
Applied Physics Letters
Astronomy
Physics
In Situ Infrared Absorption Study of Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride
Silicon Carbon Nitride Thin Films Deposited by Pulsed Microwave Plasma Assisted Chemical Vapour Deposition
Journal of Applied Sciences
Development of Low Temperature Silicon Nitride and Silicon Dioxide Films by Inductively-Coupled Plasma Chemical Vapor Deposition
Materials Research Society Symposium - Proceedings
Mechanics of Materials
Materials Science
Condensed Matter Physics
Mechanical Engineering
Improvement of Silicon Nitride Film Deposition Rate by Low Frequency Double Plasma CVD Methode.
SHINKU
Structural and Electrical Properties of Silicon Nitride Films Prepared by Multipolar Plasma‐enhanced Deposition
Journal of Applied Physics
Astronomy
Physics
Low-Temperature Chemical-Vapor-Deposition of Silicon Nitride
Le Journal de Physique IV
Approaching Defect-Free Amorphous Silicon Nitride by Plasma-Assisted Atomic Beam Deposition for High Performance Gate Dielectric
Scientific Reports
Multidisciplinary
Nanoparticle Deposition in Hydrogenated Amorphous Silicon Films During Rf Plasma Deposition
Applied Physics Letters
Astronomy
Physics
