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Publications by K. Najafi

A Silicon Micromachined Scanning Thermal Profiler With Integrated Elements for Sensing and Actuation

IEEE Transactions on Electron Devices
Electronic EngineeringOpticalElectricalMagnetic MaterialsElectronic
1997English

Vacuum Packaging Technology Using Localized Aluminum/Silicon-to-Glass Bonding

Journal of Microelectromechanical Systems
Electronic EngineeringElectricalMechanical Engineering
2002English

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