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Publications by Karen Petrillo

Reduction of Critical Dimension Difference in Litho-Etch-Litho- Etch Double Patterning Process

Journal of Photopolymer Science and Technology

Organic Chemistry

Materials Chemistry

English

The Lithographic Performance and Contamination Resistance of a New Family of Chemically Amplified DUV Photoresists.

Journal of Photopolymer Science and Technology

Organic Chemistry

Materials Chemistry

English

Related publications

LITHO, a Computerized Approach to Lithofacies Determination

Bulletin of the Geological Society of Malaysia

Planetary Sciences

English

A Study of Parameters Related to the Etch Rate for a Dry Etch Process Using NF3/O2and SF6/O2

Advances in Materials Science and Engineering

Materials Science

English

Litho-, Humic- And Pollen Stratigraphy at Quick Moss, Northumberland

Journal of Ecology

English

Investigation of the Neutral-Solution Etch Process for Refractive SOE Antireflective Surfaces

English

Tracking Plasma Etch Process Variations Using Principal Component Analysis of Oes Data

English

Effect of Double-Layer Application on Dentin Bond Durability of One-Step Self-Etch Adhesives

Operative Dentistry

English

Litho- And Chemostratigraphy of the Flatreef PGE Deposit, Northern Bushveld Complex

Mineralium Deposita

Economic Geology

English

Extremely High Selective Etching of Porous Si for Single Etch-Stop Bond-And-Etch-Back SOI

English

Etch Pit Growth Behavior During DC Etching.

Journal of the Surface Finishing Society of Japan

English