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Publications by Kazuma Yamamoto
Advances and Challenges in Developable Bottom Anti-Reflective Coating (DBARC)
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
Progress in Spin-On Hard Mask Materials for Advanced Lithography
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
Related publications
Implant Resist Approaches for 193nm Second Generation Radiation Sensitive Developable Bottom Anti Reflective Coatings
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
Bottom Anti-Reflective Coatings for DUV Lithography.
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
Synthesis of MgF2 Nanoparticles for Improved Anti-Reflective Coating
Journal of Korean Institute of Metals and Materials
Surfaces
Alloys
Metals
Simulation
Optical
Magnetic Materials
Films
Modeling
Coatings
Electronic
The Need of Top Anti-Reflective Coating Materials for ArF Immersion Lithography
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
Reflective Assessment: Opportunities and Challenges
Reference Services Review
E-learning
Library
Information Sciences
Anticipatory Life Cycle Assessment of Sol-Gel Derived Anti-Reflective Coating for Greenhouse Glass
Journal of Cleaner Production
Industrial
Environmental Science
Renewable Energy
Manufacturing Engineering
Strategy
Sustainability
Management
the Environment
Development and Research of Two-Layer Anti-Reflective Coating SiO2 / ITO for Solar Cells Based on Amorphous Silicon.
Journal of Radio Electronics
Advances and Challenges in Log Analysis
Queue
Computer Science
Developable Mechanisms on Developable Surfaces
Science Robotics
Control
Computer Science Applications
Optimization
Mechanical Engineering
Artificial Intelligence
