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Publications by Kazuyoshi Sugihara
New Charge Control Technology by Stencil Mask Ion Implantation
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Charge State Defect Engineering of Silicon During Ion Implantation
Materials Research Society Symposium - Proceedings
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New Illumination Technology for Mask Aligner Lithography
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New Method for Diagnostics of Ion Implantation Induced Charge Carrier Traps in Micro- And Nanoelectronic Devices
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Texture Manipulation by Ion Implantation
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Square-Aperture Microlens Array Fabrication by the Moving Mask Technology
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